Laser-micromachined silicon-platelet feedhorns for large-scale submillimeter and millimeter-wave focal planes

Abstract

We present the fabrication and characterization of the first silicon-platelet feedhorn arrays produced using laser micromachining. First, we present a demonstration of the technology for the millimeter-wave band of 80~GHz to 170~GHz, i.e. covering the 90/150~GHz bands typical of CMB experiments. Next, we expand the technology to large-scale production on 150~mm wafers and demonstrate operation at submillimeter wavelengths. This feedhorn array is optimized for operation in a band centered at 350~…